What's this?

[tomhl100]

Hi everyone,
Just curious about this mystery piece of hardware. Can anyone tell me what this is? It's a round aluminum 11" diameter disc that has little drilled in indentions. It has screw bolts around the sides that looks like it attaches to something. THanks so much! Tom

 

[IRstuff]

How big and deep are the indentations?

There are plenty of on-line free image transfer services on the web.

TTFN

 

[tomhl100]

The indentations are not deep enough to go all the way through the surface pf the plate.

 

[nbucska]

tomb:
The aluminum is NOT semiconductor

<nbucska@pcperipherals DOT com> subj: eng-tips
read FAQ240-1032

 

[IRstuff]

It may just be a flange cover.

Not sure about the indentations, tho...

TTFN

 

[elfgriper]

tomhl100,
Sounds like a anode for a rf etcher. Its common to place a Silicon wafer on a plate (cathode) & place above it a anode with holes to feed argon, silicon tetafloride or other gas into a vacuum chamber just above the wafer. Then rf is introduced on to the catode which excits the gas. Then positive Ions in the excited gas (plasma)are drawn to the cathode (wafer) where they chemically or physically (sputter) remove unprotected parts (photo resist masking) of the surface of the wafer forming transistor gates, interconnecting conductor lines ect. There can be hundreds of these steps in a semiconductor process.
-elf