Help on Chemical Vapour Deposition. How is it done? 1

[aditsl]

Hi,
I am working at a company where CVD is used as a coating method. We do TiN, Al2O3 coatings on carbides.
I wanted to know more about the technology. I know a bit about temperature and pressure requirements and equipments used. But I am not clear about the actual reactions taking place inside the reactor. Could you please throw some light on this aspect?

 

[unclesyd]

Get your equipment suppliers technical manuals.

 

[aditsl]

Thanks,
but there are no reactions mentioned in the equipment suppliers technical manuals.
It contains all the information on other technical aspects such as electricals, mass flow controllers etc. I could also find process flow diagrams and all except the reactions and things like mass balances etc. A standard set of gas flows temperatures and pressures are given. I could figure out the reactions from them but I am not sure whether those are correct.

 

[unclesyd]

Things have changed as the CVD equipment we had there was a great deal of information in the technical manual. The caveat being that at the time they were fewer materials amendable to CVD. I have never seen a complete list of all reactants with chemical and physical parameters of the deposition reactions.

Here is a short introduction to CVD and few reactions.

http://en.wikipedia.org/wiki/Chemical_vapor_deposition

If you want to really get involved in the chemistry of CVD here is a good starting point from Time Domain.

http://www.timedomaincvd.com/CVD_Fundamentals/chemistry/chemTOC.html

Here is the complete package.

http://www.timedomaincvd.com/CVD_Fundamentals/Fundamentals_of_CVD.html