Thanks,
but there are no reactions mentioned in the equipment suppliers technical manuals.
It contains all the information on other technical aspects such as electricals, mass flow controllers etc. I could also find process flow diagrams and all except the reactions and things like mass balances...
Hi,
I am working at a company where CVD is used as a coating method. We do TiN, Al2O3 coatings on carbides.
I wanted to know more about the technology. I know a bit about temperature and pressure requirements and equipments used. But I am not clear about the actual reactions taking place inside...
