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Nitrogen Specification for Maximum Argon Impurity?

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Pipeline1972

Mechanical
Apr 22, 2004
76
Hello,
i' ve been trying to find a specification for nitrogen usage in a fab that has requirements for max argon concentrations. So far i wasn't able to find a reference to argon impurity for nitrogen.
Does anyone have a suggestion? The fab is a semiconductor one.
Thanks!

Process - Piping
ing - EiT
 
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I think the best bet is to get with your supplier and see what he has to offer and what he can hold the analysis to.
Unless it has changed there is a max number given like 3 ppm of an impurity. This means that there can never be over 3 ppm of said impurity in the gas and is more than likely none. You normally have to go with your supplier since analysing for these low impurity limits is very expensive.

I would definitely look at this the Scott site as they are speciality gas suppliers.

 
Thanks for the tip.
I did check out some suppliers, but so far couldn't find one that mentions argon impurity in its nitrogen spec. Thing is, our customer has such requirement..

Process - Piping
ing - EiT
 
You need to call your supplier and see if they do an analysis for Argon but don't report it as there is no requirement for Argon to be reported. If they don't do this because the normal high purity gas specs don't require it you will have to ask them what it will cost to have N2 reported. If you are only talking about a small quanity you are talking about a very high surcharge to have Argon reported.

Looking at Matheson's spec's they offer individual cylinder analysis for a small fee. So you need to call them with your specification and see if they can meet it and how much it will cost to report the Argon content.



If you can comeback with your client's specification for Argon it might open up the possibilities of having a N2 purifier or a N2 Generator.
 
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