Pipeline1972
Mechanical
- Apr 22, 2004
- 76
Hello,
i' ve been trying to find a specification for nitrogen usage in a fab that has requirements for max argon concentrations. So far i wasn't able to find a reference to argon impurity for nitrogen.
Does anyone have a suggestion? The fab is a semiconductor one.
Thanks!
Process - Piping
ing - EiT
i' ve been trying to find a specification for nitrogen usage in a fab that has requirements for max argon concentrations. So far i wasn't able to find a reference to argon impurity for nitrogen.
Does anyone have a suggestion? The fab is a semiconductor one.
Thanks!
Process - Piping
ing - EiT