jongyonkim
Electrical
- Aug 3, 2006
- 24
Hi,
With ABAQUS/Explicit, I'm performing a force vs displacement measurement of a 100mm x 100mm x 0.5mm Silicon wafer (applying BC of velocity in the center, wafer sitting on frictionless "square ring", wafer slips down through if displacement is too high).
Use the following to extract the force vs displacement graph:
1) obtain ALLWK, U2 (direction of displacment, down)
2) force = differentiate(combine(U2, ALLWK))
I use (1mm, 1kg, 1ms) for scaling.
I noticed that when I pull the center at 1m/s, the data I get is pretty reasonable. However, when I pull the center at 10m/s, the data is way off. However, force should not depend too much on pulling speed...
I am wondering why this is the case. Also, I'm not too sure if 1m/s is still too fast for such structure. Any MEMS advice?
Thank you in advance
With ABAQUS/Explicit, I'm performing a force vs displacement measurement of a 100mm x 100mm x 0.5mm Silicon wafer (applying BC of velocity in the center, wafer sitting on frictionless "square ring", wafer slips down through if displacement is too high).
Use the following to extract the force vs displacement graph:
1) obtain ALLWK, U2 (direction of displacment, down)
2) force = differentiate(combine(U2, ALLWK))
I use (1mm, 1kg, 1ms) for scaling.
I noticed that when I pull the center at 1m/s, the data I get is pretty reasonable. However, when I pull the center at 10m/s, the data is way off. However, force should not depend too much on pulling speed...
I am wondering why this is the case. Also, I'm not too sure if 1m/s is still too fast for such structure. Any MEMS advice?
Thank you in advance
