Hello,
I would like to know some useful sources (websites/books) from which I can get information on RF plasma generators and matching networks. I am having difficulty with tuning my Matching network (to lower the reflected power). I am guessing that my network is at its capacitance limit...
Hello,
I would like to know some useful sources (websites/books) from which I can get information on RF plasma generators and matching networks. I am having difficulty with tuning my Matching network (to lower the reflected power). I am guessing that my network is at its capacitance limit...